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Johanna Reif
Johanna Reif
Institut für Halbleiter- und Mikrosystemtechnik, TU Dresden
Verified email at tu-dresden.de
Title
Cited by
Cited by
Year
3D system integration on 300 mm wafer level: High-aspect-ratio TSVs with ruthenium seed layer by thermal ALD and subsequent copper electroplating
S Killge, I Bartusseck, M Junige, V Neumann, J Reif, C Wenzel, ...
Microelectronic Engineering 205, 20-25, 2019
212019
Demonstration of a graphene-base heterojunction transistor with saturated output current
C Strobel, CA Chavarin, B Leszczynska, S Leszczynski, F Winkler, ...
Journal of Applied Physics 125 (23), 2019
122019
Characterisation of Cu/Cu bonding using self-assembled monolayer
M Lykova, I Panchenko, U Künzelmann, J Reif, M Geidel, MJ Wolf, ...
Soldering & Surface Mount Technology 30 (2), 106-111, 2018
122018
In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
J Reif, M Knaut, S Killge, F Winkler, M Albert, JW Bartha
Journal of Vacuum Science & Technology A 38 (1), 2020
112020
Novel Graphene Adjustable-Barrier Transistor with Ultra-High Current Gain
C Strobel, CA Chavarin, K Richter, M Knaut, J Reif, S Völkel, A Jahn, ...
ACS Applied Materials & Interfaces 14 (34), 39249-39254, 2022
72022
Ti: sapphire based lidar systems
JP Wolf, J Kolenda, P Rairoux, J Reif, M Douard, M Ulbricht
Laser in der Umweltmeßtechnik/Laser in Remote Sensing: Vorträge des 11 …, 1994
61994
Calibration procedures of lidar systems
M Ulbricht, P Rairoux, J Reif, D Weidauer, JP Wolf
Optical Sensing in Environmental Monitoring 2112, 194-197, 1993
61993
In situ studies on atomic layer etching of aluminum oxide using sequential reactions with trimethylaluminum and hydrogen fluoride
J Reif, M Knaut, S Killge, M Albert, T Mikolajick, JW Bartha
Journal of Vacuum Science & Technology A 40 (3), 2022
52022
Influences on Plasmon Resonance Linewidth in Metal− Insulator− Metal Structures Obtained via Colloidal Self-Assembly
Y Yu, D Schletz, J Reif, F Winkler, M Albert, A Fery, R Kirchner
ACS Applied Materials & Interfaces 12 (50), 56281-56289, 2020
52020
In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
J Reif, M Knaut, S Killge, M Albert, JW Bartha
Microelectronic Engineering 211, 13-17, 2019
32019
Dry release of MEMS origami using thin Al2O3 films for facet-based device integration
J Zhang, J Reif, C Strobel, P Chava, A Erbe, A Voigt, T Mikolajick, ...
Micro and Nano Engineering 19, 100179, 2023
22023
Improved graphene-base heterojunction transistor with different collector semiconductors for high-frequency applications
C Strobel, C Chavarin, S Leszczynski, K Richter, M Knaut, J Reif, S Völkel, ...
Advanced Materials Letters 13 (1), 2201-1688, 2022
22022
Hole selective nickel oxide as transparent conductive oxide
D Tröger, J Reif, T Mikolajick, M Grube
Journal of Vacuum Science & Technology A 40 (1), 2022
22022
Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers
DD Fischer, M Knaut, J Reif, F Nehm, M Albert, JW Bartha
Journal of Vacuum Science & Technology A 38 (2), 2020
22020
Towards Full-area Passivating Contacts for Silicon Surfaces based on Al2O3-TiOxDouble Layers
D Tröger, M Grube, M Knaut, J Reif, JW Bartha, T Mikolajick
2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC)(A …, 2018
22018
Cu passivation with self-assembled monolayers for direct metal bonding in 3D integration
M Lykova, I Panchenko, M Geidel, J Reif, JM Wolf, KD Lang
2017 40th International Spring Seminar on Electronics Technology (ISSE), 1-6, 2017
22017
Comparison of three titanium-precursors for atomic-layer-deposited TiO2 for passivating contacts on silicon
D Hiller, F Munnik, J López-Vidrier, D Solonenko, J Reif, M Knaut, ...
Journal of Vacuum Science & Technology A 42 (3), 2024
12024
3D system integration on 300 mm wafer level
S Kilige, I Bartusseck, M Junige, V Neumann, J Reif, C Wenzel, ...
2019
Towards Full-area Passivating Contacts for Silicon Surfaces based on Al₂O₃-TiOₓ Double Layers
D Tröger, M Grube, M Knaut, J Reif, JW Bartha, T Mikolajick
2018
PEALD and pulsed CVD of Cobalt thin films using the precursor cyclopentadienylcobalt dicarbonyl
C Hossbach, S Shukla, D Fischer, J Reif, S Bönhardt, M Geidel, M Albert, ...
2017
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Articles 1–20