Thick SiOxNy and SiO2 films obtained by PECVD technique at low temperatures MI Alayo, I Pereyra, MNP Carreno Thin Solid Films 332 (1-2), 40-45, 1998 | 120 | 1998 |
Wide gap a-Si1− xCx: H thin films obtained under starving plasma deposition conditions I Pereyra, MNP Carreño Journal of non-crystalline solids 201 (1-2), 110-118, 1996 | 80 | 1996 |
Wide optical band gap window layers for solar cells Z Yu, I Pereyra, MNP Carreno Solar energy materials and solar cells 66 (1-4), 155-162, 2001 | 69 | 2001 |
The influence of “starving plasma” regime on carbon content and bonds in a-Si1− xCx: H thin films I Pereyra, MNP Carreno, MH Tabacniks, RJ Prado, MCA Fantini Journal of applied physics 84 (5), 2371-2379, 1998 | 66 | 1998 |
On the structural properties of a‐Si1−xCx:H thin films V Mastelaro, AM Flank, MCA Fantini, DRS Bittencourt, MNP Carreño, ... Journal of applied physics 79 (3), 1324-1329, 1996 | 60 | 1996 |
Microvoids in diamond‐like amorphous silicon carbide MNP Carreno, I Pereyra, MCA Fantini, H Takahashi, R Landers Journal of applied physics 75 (1), 538-542, 1994 | 60 | 1994 |
Low temperature plasma enhanced chemical vapour deposition boron nitride MNP Carreno, JP Bottecchia, I Pereyra Thin Solid Films 308, 219-222, 1997 | 56 | 1997 |
Post thermal annealing crystallization and reactive ion etching of SiC films produced by PECVD AR Oliveira, MNP Carreno Journal of Non-Crystalline Solids 352 (9-20), 1392-1397, 2006 | 49 | 2006 |
PECVD-SiOxNy films for large area self-sustained grids applications MNP Carreno, MI Alayo, I Pereyra, AT Lopes Sensors and Actuators A: Physical 100 (2-3), 295-300, 2002 | 46 | 2002 |
Mechanical properties of boron nitride thin films obtained by RF-PECVD at low temperatures J Vilcarromero, MNP Carreño, I Pereyra Thin Solid Films 373 (1-2), 273-276, 2000 | 36 | 2000 |
Self-sustained bridges of a-SiC: H films obtained by PECVD at low temperatures for MEMS applications MNP Carreño, AT Lopes Journal of Non-Crystalline Solids 338, 490-495, 2004 | 34 | 2004 |
Fabrication of PECVD-silicon oxynitride-based optical waveguides MI Alayo, D Criado, MNP Carreño, I Pereyra Materials Science and Engineering: B 112 (2-3), 154-159, 2004 | 31 | 2004 |
N and p-type doping of PECVD a-SiC: H obtained under “silane starving plasma” condition with and without hydrogen dilution AR Oliveira, MNP Carreño Materials Science and Engineering: B 128 (1-3), 44-49, 2006 | 28 | 2006 |
Directional random laser source consisting of a HC-ARROW reservoir connected to channels for spectroscopic analysis in microfluidic devices KC Jorge, MA Alvarado, EG Melo, MNP Carreño, MI Alayo, NU Wetter Applied Optics 55 (20), 5393-5398, 2016 | 27 | 2016 |
Membranes of SiOxNy with 3D topography formed by PECVD for MEMS applications AT Lopes, MNP Carreño Journal of non-crystalline solids 338, 788-792, 2004 | 24 | 2004 |
Ultrasensitive microfluidic electrochemical immunosensor based on electrodeposited nanoporous gold for SOX-2 determination M Regiart, AM Gimenez, AT Lopes, MNP Carreno, M Bertotti Analytica Chimica Acta 1127, 122-130, 2020 | 22 | 2020 |
Highly ordered amorphous silicon-carbon alloys obtained by RF PECVD I Pereyra, CA Villacorta, MNP Carreño, RJ Prado, MCA Fantini Brazilian Journal of Physics 30, 533-540, 2000 | 20 | 2000 |
Thermally actuated a-SiC: H MEMS fabricated by a PECVD process G Rehder, MNP Carreño Journal of non-crystalline solids 352 (9-20), 1822-1828, 2006 | 19 | 2006 |
p-Type doping in a-Si1− xCx: H obtained by PECVD MNP Carreño, I Pereyra Journal of non-crystalline solids 266, 699-703, 2000 | 17* | 2000 |
Miniature planar fluxgate magnetic sensors using a single layer of coils T Heimfarth, MZ Mielli, MNP Carreño, M Mulato IEEE Sensors Journal 15 (4), 2365-2369, 2014 | 15 | 2014 |