| An integrated force-balanced capacitive accelerometer for low-g applications KHL Chau, SR Lewis, Y Zhao, RT Howe, SF Bart, RG Marcheselli Sensors and Actuators A: Physical 54 (1-3), 472-476, 1996 | 331 | 1996 |
| Scaling limits in batch-fabricated silicon pressure sensors HL Chau, KD Wise 1985 International conference on solid-state sensors and actuators …, 1985 | 235 | 1985 |
| An ultraminiature solid-state pressure sensor for a cardiovascular catheter HL Chau, KD Wise IEEE transactions on Electron Devices 35 (12), 2355-2362, 1988 | 225 | 1988 |
| Ultraminiature pressure sensor with addressable read-out circuit KD Wise, HL Chau US Patent 5,113,868, 1992 | 198 | 1992 |
| Multipoint pressure-sensing catheter system KD Wise, HL Chau US Patent 4,815,472, 1989 | 190 | 1989 |
| Ultraminiature pressure sensor and method of making same KD Wise, HL Chau US Patent 4,881,410, 1989 | 120 | 1989 |
| Ultraminiature single-crystal sensor with movable member KD Wise, HL Chau US Patent 5,207,103, 1993 | 113 | 1993 |
| A low cost monolithic accelerometer; product/technology update Tsang, Core, Payne, Quinn, Chau, Farash, Baum 1992 International Technical Digest on Electron Devices Meeting, 501-504, 1992 | 90 | 1992 |
| Method of making an ultraminiature pressure sensor KD Wise, HL Chau US Patent 5,013,396, 1991 | 84 | 1991 |
| Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products KHL Chau, RE Sulouff Jr Microelectronics Journal 29 (9), 579-586, 1998 | 71 | 1998 |
| Method for fabricating microstructures using temporary bridges KHL Chau, MP Saltmarsh, DA Church US Patent 5,364,497, 1994 | 60 | 1994 |
| Conductive plane beneath suspended microstructure KHL Chau, RT Howe, RS Payne, Y Zhao, TA Core, SJ Sherman US Patent 5,858,809, 1999 | 52 | 1999 |
| Noise due to Brownian motion in ultrasensitive solid-state pressure sensors HL Chau, KD Wise IEEE transactions on electron devices 34 (4), 859-865, 1987 | 46 | 1987 |
| Overpressure-protected, differential pressure sensor and method of making the same CD Fung, KHL Chau, PR Harris, JG Panagou, GA Dahrooge US Patent 5,220,838, 1993 | 42 | 1993 |
| Conductive plane beneath suspended microstructure KHL Chau, RT Howe, RS Payne, Y Zhao, TA Core, SJ Sherman US Patent 5,640,039, 1997 | 40 | 1997 |
| Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same CD Fung, KHL Chau US Patent 5,344,523, 1994 | 33 | 1994 |
| Stress mitigation in packaged microchips X Zhang, M Judy, KHL Chau, N Kuan, T Spooner, C Paydenkar, P Farrell US Patent 8,344,487, 2013 | 25 | 2013 |
| Removing sacrificial material through temporary channels as a method of making an overpressure-protected differential pressure sensor CD Fung, KHL Chau, PR Harris, JG Panagou, GA Dahrooge US Patent 5,438,875, 1995 | 25 | 1995 |
| Method for calibrating accelerometer sensitivity KHL Chau, HR Samuels US Patent 7,093,478, 2006 | 24 | 2006 |
| A versatile polysilicon diaphragm pressure sensor chip KHL Chau, CD Fung, PR Harris, GA Dahrooge International Electron Devices Meeting 1991 [Technical Digest], 761-764, 1991 | 24 | 1991 |
王文 (Man WONG)Department of Electronic and Computer Engneering, The Hong Kong University of Science and TechnologyVerified email at ieee.org