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Richard Kasica
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Low-loss, extreme subdiffraction photon confinement via silicon carbide localized surface phonon polariton resonators
JD Caldwell, OJ Glembocki, Y Francescato, N Sharac, V Giannini, ...
Nano letters 13 (8), 3690-3697, 2013
3572013
Plasmonic nanopillar arrays for large-area, high-enhancement surface-enhanced Raman scattering sensors
JD Caldwell, O Glembocki, FJ Bezares, ND Bassim, RW Rendell, ...
ACS nano 5 (5), 4046-4055, 2011
2492011
Spectral tuning of localized surface phonon polariton resonators for low-loss mid-IR applications
Y Chen, Y Francescato, JD Caldwell, V Giannini, TWW Maß, ...
Acs Photonics 1 (8), 718-724, 2014
1612014
Directed Self-Assembly of Epitaxial CoFe2O4–BiFeO3 Multiferroic Nanocomposites
R Comes, H Liu, M Khokhlov, R Kasica, J Lu, SA Wolf
Nano letters 12 (5), 2367-2373, 2012
1482012
Mie resonance-enhanced light absorption in periodic silicon nanopillar arrays
FJ Bezares, JP Long, OJ Glembocki, J Guo, RW Rendell, R Kasica, ...
Optics Express 21 (23), 27587-27601, 2013
1432013
Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
JD Caldwell, OJ Glembocki, FJ Bezares, MI Kariniemi, JT Niinistö, ...
Optics express 19 (27), 26056-26064, 2011
812011
The nanolithography toolbox
KC Balram, DA Westly, M Davanco, KE Grutter, Q Li, T Michels, CH Ray, ...
Journal of Research of the National Institute of Standards and Technology …, 2016
792016
Nanoscale imaging and spectroscopy of plasmonic modes with the PTIR technique
AM Katzenmeyer, J Chae, R Kasica, G Holland, B Lahiri, A Centrone
Adv. Opt. Mater 2 (8), 718-722, 2014
622014
Aspect-ratio driven evolution of high-order resonant modes and near-field distributions in localized surface phonon polariton nanostructures
CT Ellis, JG Tischler, OJ Glembocki, FJ Bezares, AJ Giles, R Kasica, ...
Scientific reports 6 (1), 32959, 2016
402016
Initial lithography results from the digital electrostatic e-beam array lithography concept
LR Baylor, WL Gardner, X Yang, RJ Kasica, MA Guillorn, B Blalock, H Cui, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004
382004
Nanoparticle size determination using optical microscopes
R Attota, PP Kavuri, H Kang, R Kasica, L Chen
Applied Physics Letters 105 (16), 2014
372014
The role of propagating and localized surface plasmons for SERS enhancement in periodic nanostructures
FJ Bezares, JD Caldwell, O Glembocki, RW Rendell, M Feygelson, ...
Plasmonics 7, 143-150, 2012
352012
SCALPEL proof-of-concept system: Preliminary lithography results
WK Waskiewicz, CJ Biddick, MI Blakey, KJ Brady, RM Camarda, ...
Emerging Lithographic Technologies 3048, 255-263, 1997
271997
Cryogenic etching of high aspect ratio 400-nm pitch silicon gratings
H Miao, L Chen, M Mirzaeimoghri, R Kasica, H Wen
Journal of Microelectromechanical Systems 25 (5), 963-967, 2016
202016
Novel organosilicate polymer resists for high resolution e-beam lithography
JH Sim, SI Lee, HJ Lee, R Kasica, HM Kim, CL Soles, KB Kim, DY Yoon
Chemistry of Materials 22 (10), 3021-3023, 2010
202010
Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system
JA Liddle, MI Blakey, K Bolan, RC Farrow, GM Gallatin, R Kasica, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001
162001
Monte Carlo study of high performance resists for SCALPEL nanolithography
LE Ocola, WY Li, RJ Kasica, MI Blakey, PA Orphanos, WK Waskiewicz, ...
Microelectronic engineering 53 (1-4), 433-436, 2000
162000
200-mm SCALPEL mask development
GR Bogart, AE Novembre, A Kornblit, ML Peabody Jr, RC Farrow, ...
Emerging Lithographic Technologies III 3676, 171-177, 1999
141999
Through-focus scanning and scatterfield optical methods for advanced overlay target analysis
R Attota, M Stocker, R Silver, A Heckert, H Zhou, R Kasica, L Chen, ...
Metrology, Inspection, and Process Control for Microlithography XXIII 7272 …, 2009
132009
Commercialization of SCALPEL masks
RC Farrow, AE Novembre, M Peabody, R Kasica, M Blakey, JA Liddle, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1998
101998
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