| Demonstration of BEOL-compatible ferroelectric Hf0.5Zr0.5O2 scaled FeRAM co-integrated with 130nm CMOS for embedded NVM applications T Francois, L Grenouillet, J Coignus, P Blaise, C Carabasse, N Vaxelaire, ... 2019 IEEE International Electron Devices Meeting (IEDM), 15.7. 1-15.7. 4, 2019 | 120 | 2019 |
| Dislocation storage in single slip-oriented Cu micro-tensile samples: new insights via X-ray microdiffraction C Kirchlechner, D Kiener, C Motz, S Labat, N Vaxelaire, O Perroud, ... Philosophical Magazine 91 (7-9), 1256-1264, 2011 | 54 | 2011 |
| Demonstration of BEOL-compatible ferroelectric Hf T Francois, L Grenouillet, J Coignus, P Blaise, C Carabasse, N Vaxelaire IEDM Tech. Dig, 15.7, 2019 | 46 | 2019 |
| Nanosecond laser anneal (NLA) for Si-implanted HfO2 ferroelectric memories integrated in back-end of line (BEOL) L Grenouillet, T Francois, J Coignus, S Kerdiles, N Vaxelaire, ... 2020 IEEE Symposium on VLSI Technology, 1-2, 2020 | 40 | 2020 |
| Correlation between electric-field-induced phase transition and piezoelectricity in lead zirconate titanate films V Kovacova, N Vaxelaire, G Le Rhun, P Gergaud, T Schmitz-Kempen, ... Physical Review B 90 (14), 140101, 2014 | 40 | 2014 |
| Methodology for studying strain inhomogeneities in polycrystalline thin films during in situ thermal loading using coherent x-ray diffraction N Vaxelaire, H Proudhon, S Labat, C Kirchlechner, J Keckes, V Jacques, ... New Journal of Physics 12 (3), 035018, 2010 | 35 | 2010 |
| Impact of area scaling on the ferroelectric properties of back-end of line compatible Hf0. 5Zr0. 5O2 and Si: HfO2-based MFM capacitors T Francois, L Grenouillet, J Coignus, N Vaxelaire, C Carabasse, ... Applied Physics Letters 118 (6), 2021 | 32 | 2021 |
| 2019 IEEE International Electron Devices Meeting (IEDM) T Francois, L Grenouillet, J Coignus, P Blaise, C Carabasse, N Vaxelaire, ... IEEE, 2019 | 27 | 2019 |
| Evolution of surface roughness in silicon X-ray mirrors exposed to a low-energy ion beam E Ziegler, L Peverini, N Vaxelaire, A Cordon-Rodriguez, A Rommeveaux, ... Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2010 | 27 | 2010 |
| Actuation efficiency of polyvinylidene fluoride-based co-and ter-polymers P Lheritier, S Noel, N Vaxelaire, FD Dos Santos, E Defay Polymer 156, 270-275, 2018 | 20 | 2018 |
| New insights into single-grain mechanical behavior from temperature-dependent 3-D coherent X-ray diffraction N Vaxelaire, S Labat, TW Cornelius, C Kirchlechner, J Keckes, T Schulli, ... Acta materialia 78, 46-55, 2014 | 19 | 2014 |
| Performance assessment of BEOL-integrated HfO2-based ferroelectric capacitors for FeRAM memory arrays L Grenouillet, T Francois, J Coignus, N Vaxelaire, C Carabasse, F Triozon, ... 2020 IEEE Silicon Nanoelectronics Workshop (SNW), 5-6, 2020 | 18 | 2020 |
| BEOL Integrated Ferroelectric HfO₂-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions R Alcala, M Materano, PD Lomenzo, L Grenouillet, T Francois, J Coignus, ... IEEE Journal of the Electron Devices Society 10, 907-912, 2022 | 16 | 2022 |
| Sub-micrometre depth-gradient measurements of phase, strain and texture in polycrystalline thin films: a nano-pencil beam diffraction approach N Vaxelaire, P Gergaud, GBM Vaughan Journal of Applied Crystallography 47 (2), 495-504, 2014 | 15 | 2014 |
| Improvement of HfO2based RRAM array performances by local Si implantation M Barlas, A Grossi, L Grenouillet, E Vianello, E Nolot, N Vaxelaire, ... 2017 IEEE International Electron Devices Meeting (IEDM), 14.6.1-14.6.4., 2018 | 13 | 2018 |
| Overcoming the Thermal Stability Limit of Chalcogenide Phase‐Change Materials for High‐Temperature Applications in GeSe1−xTex Thin Films M Tomelleri, F Hippert, T Farjot, C Licitra, N Vaxelaire, JB Dory, D Benoit, ... physica status solidi (RRL)–Rapid Research Letters 15 (3), 2000451, 2021 | 12 | 2021 |
| Effect of structural in-depth heterogeneities on electrical properties of Pb (Zr0. 52Ti0. 48) O3 thin films as revealed by nano-beam X-ray diffraction N Vaxelaire, V Kovacova, A Bernasconi, G Le Rhun, M Alvarez-Murga, ... Journal of Applied Physics 120 (10), 2016 | 10 | 2016 |
| Microstructural and chemical analysis of polycrystalline LiNbO3 films obtained by room-temperature RF sputtering after various annealing durations LC Sauze, N Vaxelaire, D Rouchon, F Pierre, R Templier, D Remiens, ... Journal of Vacuum Science & Technology A 38 (4), 2020 | 9 | 2020 |
| Synthesis of In-Plane Oriented Tin Sulfides by Organosulfur-Mediated Sulfurization of Ultrathin SnO2 Films B Chatmaneerungcharoen, M Fraccaroli, F Martin, C Guedj, E Nolot, ... Chemistry of Materials 34 (13), 5842-5851, 2022 | 7 | 2022 |
| 2020 IEEE Symposium on VLSI Technology L Grenouillet, T Francois, J Coignus, S Kerdiles, N Vaxelaire, ... IEEE, 2020 | 7 | 2020 |
