Xin Yin (殷鑫)

Xin Yin (殷鑫)

Process Engineer, Lam Research
Verified email at lamresearch.com
Cited by 2694
PECVD PEALD Dielectric/Metal Thin Films Growth Kinetics 2D Electronics
Dr. Ashok M Mahajan

Dr. Ashok M Mahajan

University Emeritus Professor & Ex-Senior Professor and Head, Deptt of Electronics …
Verified email at nmu.ac.in
Cited by 775
High-k &low-k dielectrics PEALD Sol-gel MOS devices MIM capacitors
전성훈

전성훈

Kongju University
Cited by 762
ALD semiconductor equipment deposition equipment PEALD
TaeHee Yoo

TaeHee Yoo

SAMSUNG ELECTRONICS
Verified email at asm.com
Cited by 635
Nano materials MOSFET PEALD
Sathish Janjam

Sathish Janjam

Lam Research
Verified email at lamresearch.com
Cited by 209
Semiconductors PECVD ALD PEALD CMP
Dr. Vilas S. Patil

Dr. Vilas S. Patil

Marie Curie Fellow Tyndall Nation Institute Cork Ireland
Verified email at tyndall.ie
Cited by 176
High-k Materials Si & Ge- MOS PEALD 2D Materials growth etc..
Jinhong Kim

Jinhong Kim

Postdoctoral Research Associate, University of Illinois Urbana Champaign
Verified email at illinois.edu
Cited by 166
Microplasma PEALD Nanotechnology Fabrication Microelectronics
Imane Abdellaoui

Imane Abdellaoui

ASM International
Verified email at asm.com
Cited by 123
Semiconductors ALD PEALD PECVD
Mohit Tendulkar

Mohit Tendulkar

Tower Semiconductor
Verified email at towersemi.com
Cited by 99
PEALD x-ray optics TFT SiGe BiCMOS Integration
Gonzalo Alonso Velázquez Nevárez

Gonzalo Alonso Velázquez Nevárez

Postdoctoral Fellow, Centro de Investigación en Materiales Avanzados
Verified email at cimav.edu.mx
Cited by 83
Thin Films Semiconductors ZnO Sol-gel PEALD
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