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Wei Zhang
Senior Manager of Process Development, Canon Nanotechnologies, Inc.
Cited by 1468
lithography
nano imprint
nanotechnology
Henry JH Chen
Professor, Dept. of EE, National Chi Nan University
Verified email at ncnu.edu.tw
Cited by 607
Nano Imprint
ISFETs
Semiconductor Technology and Devices
Juan J Faria-Briceno
PhD Optoelectronics
Verified email at unm.edu
Cited by 40
Metrology
Interferometric Lithography
Scatterometry
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