Cheng Hao Wu

Cheng Hao Wu

Lam Research
Verified email at lamresearch.com
Cited by 4037
Core-Level Spectroscopy Electrochemistry Catalysis EUV Lithography
Oleg Kostko

Oleg Kostko

Scientist, Berkeley Lab
Verified email at lbl.gov
Cited by 3863
Chemical Physics X-ray spectroscopy Instrumentation EUV lithography
Yongbeom Seo

Yongbeom Seo

Principal Engineer at Semiconductor R&D Center, Samsung Electronics // 3M, UIUC, IBS …
Verified email at samsung.com
Cited by 3708
Nanochemistry EUV Lithography Porous Material Catalysis Biomedicine
Hyun-Mi Kim

Hyun-Mi Kim

Korea Electronics Technolgy Institute
Verified email at keti.re.kr
Cited by 3315
Transmission Electron Microscopy EUV lithography
Dmitry Lopaev (ORCID: 0000-0003-4975-3487)

Dmitry Lopaev (ORCID: 0000-0003-4975-3487)

Moscow State University, Skobeltsyn Institute of Nuclear Physics, Microelectronics Dep.
Verified email at dnph.phys.msu.su
Cited by 2992
low-temperature plasma rf discharges plasma processing plasma-surface interaction EUV lithography
Qi Zhang

Qi Zhang

Scientist @ Lawrence Berkeley National Laboratory
Verified email at lbl.gov
Cited by 2832
2D devices resist materials EUV lithography
Pieter Vanelderen

Pieter Vanelderen

imec
Verified email at imec.be
Cited by 2807
EUV lithography
Mária Péter

Mária Péter

University of Twente; TNO Holst Centre; ASML
Cited by 2151
Nanotechnology Nanofabrication EUV lithography Thin Films
Shang-Chieh Chien

Shang-Chieh Chien

Verified email at nctu.edu.tw
Cited by 1844
Organic/Polymeric Solar Cells Light-emitthing diodes Photodetectors EUV Lithography
Alex Schafgans

Alex Schafgans

ASML
Verified email at asml.com
Cited by 1840
EUV Lithography laser produced plasma
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