Loading...
The system can't perform the operation now. Try again later.
Articles
Case law
Profiles
My profile
My library
Metrics
Alerts
Settings
Get journal articles
Get journal articles
Profiles
My profile
My library
Xin Yin (殷鑫)
Process Engineer, Lam Research
Verified email at lamresearch.com
Cited by 2694
PECVD
PEALD
Dielectric/Metal Thin Films
Growth Kinetics
2D Electronics
Privacy
Terms
Help
About Scholar
Search help